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SEMI E160-1211 (technical revision)
Definition of subsystem energy saving mode operation in the form of a state model
• Variable Parameter management
It is not intended to specify a complete set of equipment types
SEMI E5 ¾ SEMI Equipment Communications Standard 2 Message Content (SECS-II)
E12800 - SEMI E128 - Specification for XML Message Structures StdPbc-0725 SEMI E160-1211 (technical revision)This Standard specifies XML structures required to encode message header or envelope information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas. XML is also used to structure information needed to route and deliver messages between applications. A standard for message headers is required to avoid development and
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