F09200 - SEMI F92 - Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F92-0304E - Superseded SEMI MF525-0312 (Reapproved 1023)

SEMI MF525-0312 (Reapproved 1023)

as well as for layer modification such as various means of layer etching

2-1109 (first published)

This Practice is not recommended for use in defect density evaluations

SEMI MF1530 — Test Method for Flatness

F09200 - SEMI F92 - Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F92-0304E - Superseded SEMI MF525-0312 (Reapproved 1023)This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical dimensions of two port components for 1. 5 inch type surface mount gas