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Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37
6-1103 (technical revision)
제한 사항
Other methods may be appropriate in certain circumstances
Current edition approved by the Japanese Regional Standards Committee on August 3
P03000 - SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) StdVol-Traceability Equipment Communication Standards1 Messages TransferThis standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on July 23, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1997. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to
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