P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Revision:SEMI P42-0304 - Inactive 3 The communications services defined

3  The communications services defined here enable standards-based interoperability of independent systems

SEMI M43-0418 (technical revision)

use of or logic associated with the defined physical features are given in this Specification

4  This Standard is suitable for both side-view and top-view surface mount device (SMD) LEDs

本文書の目的は，サーマル・マスフローコントローラの電磁感受性の評価および試験のための体系的方法を定めることである。

P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Revision:SEMI P42-0304 - Inactive 3 The communications services definedThis specification was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not