M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers Revision:SEMI M12-0706 - Superseded to completely describe the ISPM

to completely describe the ISPM as it appears from the network interface

SEMI D22-0818 (technical revision)

This Standard provides specification for implementing basic equipment performance tracking (EPT) for production equipment

2  Final assemblies should be evaluated according to the criteria of SEMI S2 for environmental

本仕様では標準的な

M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers Revision:SEMI M12-0706 - Superseded to completely describe the ISPMThis Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers. The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture. Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers. This consistency allows simplification of the