S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン StdPbc-0123 The unit in these figures

The unit in these figures is inch

This Test Method is intended to demonstrate the ability of a POU gas filter to equal or exceed a specific particle filtration efficiency class when challenged with a monodispersed aerosol in the size range described in § REF _Ref44403816 \h \r \t \* MERGEFORMAT 7

identification conventions

3DS-IC Global Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年9月にwww

SEMI MF951-0305 (Reapproved 0211)

S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン StdPbc-0123 The unit in these figuresNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee20091216global Audits and Reviews Subcommittee20102www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current