M04100 - SEMI M41 - Specification of Silicon-on-Insulator (SOI) for Power Device/ICs StdPbc-0125 備考：本文件在

備考：本文件在

Although existing factories can be retrofitted to implement water reuse

1  The purpose of this Guide is to establish a uniform

It establishes a set of common definitions that help specify

The test methods for the individual properties have been given in this standard

M04100 - SEMI M41 - Specification of Silicon-on-Insulator (SOI) for Power Device/ICs StdPbc-0125 備考：本文件在NOTICE: This Document was completely rewritten in 2022. This Specification covers requirements for silicon on insulator (SOI) for semiconductor power device IC manufacture. By defining inspection procedures and acceptance criteria, both users and suppliers may define product characteristics and quality requirements. This Specification provides requirements of SOI wafers, which are used for power devices ICs of specific voltage applications. The