D04800 - SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool Revision:SEMI D48-0307 - Superseded 注意： 本文書は，編集上の修正を伴い，再承認された。

注意：　本文書は，編集上の修正を伴い，再承認された。

and some are additionally capable of measuring surface nanotopography

The purpose of this Document is to provide a guide for zirconium amides for which a need has been identified

The purpose of this Document is to provide specification for carbon dioxide (CO2) that is used in the semiconductor industry

sampling sites and mapping

D04800 - SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool Revision:SEMI D48-0307 - Superseded 注意： 本文書は，編集上の修正を伴い，再承認された。This standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www. semi. org in October 2007. This standard defines the datum line of an ID two dimensional code (hereafter, 2D ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader unloader and robot),