MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdPbc-0720 SEMI M12 — Specification for

SEMI M12 — Specification for Serial Alphanumeric Marking of Silicon Wafers

This Standard is a generic specification for positional accuracy test methods of touchscreen panel including the single point and the straight line

the quality of the UPW also needs to be monitored at the POU where the UPW is in contact with the wafer

本スタンダードは， Liquid Chemicals Global Technical Committeeで技術的に承認されている。現版は2013年12月23日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年3月にwww

注意：　本文書は、編集上の修正を伴い、再承認された。

MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdPbc-0720 SEMI M12 — Specification for1 Purpose 1. 1 Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interaction with the external environment. While there is a wide range of MEMS devices, a fairly common need is for packaging that allows movement of some of the internal subcomponents of the device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected