D00900 - SEMI D9 - Terminology for FPD Substrates Revision:SEMI D9-0303 (Reapproved 0515) - Superseded 4 Although the accuracy of

4  Although the accuracy of TTV measurement is not as dependent on deflection as bow and warp are

This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23

1-1108 (technical revision)

2  This Test Method is used in general FPD production to test the resistance of color filters to heat

製品，レチクル，またはそれらのキャリア

D00900 - SEMI D9 - Terminology for FPD Substrates Revision:SEMI D9-0303 (Reapproved 0515) - Superseded 4 Although the accuracy ofNOTICE: This Document was reapproved with minor editorial changes. This Document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates. These terms and definitions are applicable to both front and back substrates used in FPD fabrication. Referenced SEMI Standards (purchase separately) SEMI D3