C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution StdTier-Tier0 such as thickness

such as thickness

FPD製造で用いられる偏光板に適用するものとする。その範囲は，材料・検査・測定で使用される，偏光板関連用語である。

This Standard specifies measurement methods

orgで入手可能となる。初版は2001年5月発行。前版は2006年11月発行。

This Guide is based on experimental data on 300-mm diameter silicon wafer pairs

C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution StdTier-Tier0 such as thicknessNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F119. The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G48 and is intended to differentiate between stainless steels of differing