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SEMI E40— Standard for Processing Management
and to define acceptance criteria for the types
Epitaxial silicon wafers may exhibit dislocations
本安全ガイドラインは，製造，計測，組立，試験のために，装置と共に使用することが意図された装置ユーザへの提供文書に適用される。
It includes a specific transfer command state model and transport and storage system controller (TSSC) state model as the basis for all equipment of this class
C00340 - SEMI C3.40 - 四フッ化炭素（CF4），99.997%品質の仕様 StdPbc-0121 SEMI E40— Standard for Processingglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org200010 (CF4) Referenced SEMI Standards None.
