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1-0707 (technical revision)
SEMI E30-1103 (technical revision)
SEMI M12 — Specification for Serial Alphanumeric Marking of Silicon Wafers
thus allowing immediate hook-up of the equipment upon arrival in the wafer fab
As this communication concept is adopted by the various FPU suppliers and their customers
M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0307 - Superseded 1-0707 (technical revision)This Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which
