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SEMI E156-0710 (first published)
SEMI E39 —Object Services Standard: Concept
Subordinate Standards (included)
The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry
and process program management
E16400 - SEMI E164 - Specification for EDA Common Metadata StdDcs-Inactive SEMI E156-0710 (first published)The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor
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