C03600 - SEMI C36 - Specification for Phosphoric Acid Revision:SEMI C36-0705 - Superseded org in October 2005

org in October 2005

It was replaced by SEMI C70

免責事項：このSEMIスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡

on one hand

1  The purpose of this Standard is to standardize requirements for hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards

C03600 - SEMI C36 - Specification for Phosphoric Acid Revision:SEMI C36-0705 - Superseded org in October 2005The purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. The scope of this Specification is for grades of phosphoric acid used in the semiconductor industry. Referenced