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2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components
SEMI C24-0301 (technical revision)
The purposes of this Document are (1) to set a maximum permissible particle concentration for 10/0
The type of GNP
FPD用ガラス基板のサプライヤとユーザにより使用されることを目的としている。
C06200 - SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes Revision:SEMI C62-1107 - Superseded 2 This standard specifies proceduresThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published November 2007; previously published March 2009. The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which
