E16700 - SEMI E167 - Specification for Equipment Energy Saving Mode Communications (EESM) Revision:SEMI E167-1213 - Current As a guide to equipment

As a guide to equipment suppliers on how to represent the external view of their equipment to the factory host

Reticle Pod ID verification and Reticle Pod slot map verification

Please make sure that you have reviewed your order prior to finalizing your purchase

SEMI E171-1215 (technical revision)

Synchronous message delivery is chosen when application communication requires message consumption and execution to be completed before a new message is allowed

E16700 - SEMI E167 - Specification for Equipment Energy Saving Mode Communications (EESM) Revision:SEMI E167-1213 - Current As a guide to equipmentThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www. semiviews. org and www. semi. org in December 2013. The purpose of this Specification is to define messaging and behavior to facilitate a reduced rate of energy consumption in production equipment. A mechanism is provided for the