C02400 - SEMI C24 - Specification for n-Butyl Acetate Revision:SEMI C24-0301 - Superseded NOTICE: This Document was balloted

NOTICE: This Document was balloted and approved for withdrawal in 2001

Control of parameters such as bonded wafer stack (BWS) thickness

本スタンダードは，Liquid Chemical Global Technical Committeeで技術的に承認されている。現版は2013年6月4日，global Audits and Reviews Subcommitteeにて発行が承認された。2013年7月にwww

diameter/thickness)

• Mass concentration of original polystyrene latex (PSL) particle suspension

C02400 - SEMI C24 - Specification for n-Butyl Acetate Revision:SEMI C24-0301 - Superseded NOTICE: This Document was ballotedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to standardize requirements for n butyl acetate used in the semiconductor industry and to document testing procedures to support those specifications. Test methods have been shown to