D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package StdPbc-0518 This Standard applies to compact

This Standard applies to compact size two-port/two-fastener components (except mass flow controllers and mass flow meters)

SEMI M93-0923 (first published)

業界内のニーズと，セキュリティの評価方法を表現し，その一貫した理解を得るための共通言語を提供する。

SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

and control of unwanted native or process-induced impurities or defects

D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package StdPbc-0518 This Standard applies to compact1 Purpose 1. 1 This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage. 2 Scope 2. 1 This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in