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Total Organic (Oxidizable) Carbon Contribution Limits
This Guide contains the following component:
This Document describes a test method to characterize ‘as received’ surface composition and chemistry encompassing all chromium-enriched stainless steel surfaces in tubing
or other nonvolatile elements
the testing parameters should be agreed upon by the manufacturer and the user
E12600 - SEMI E126 - Specification for Equipment Quality Information Parameters (EQIP) StdTpc-High Purity Piping Systems Total Organic (Oxidizable) Carbon ContributionThis Standard identifies key equipment quality information parameters, or EQIPs, for equipment process types or groups. The identification of these quality parameters is intended to help equipment users and suppliers specify and utilize capabilities for process control. This Standard is designed to be updated as EQIPs are identified for new and or existing equipment process types in this Standard. Intended Audience This Standard is intended for use by
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