E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models stacking faults

stacking faults

1  The scope of this Standard is all grades of acetone used in the semiconductor industry

These requirements are consistent with the requirements of SEMI M45

equipment for different substrate sizes will become simpler

身元の確認および資格認定のため，従業員とシステムセキュリティの関係を管理する。

E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models stacking faultsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this