MF002600 - SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal StdTpc-Gas Particle Specifications SEMI E121-0305 (technical revision)

SEMI E121-0305 (technical revision)

This Standard is intended for use by equipment suppliers

This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24

This Document provides standardized test methods for measuring selected characteristics of CSW

repetitive measurements may be made on the same test specimen

MF002600 - SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal StdTpc-Gas Particle Specifications SEMI E121-0305 (technical revision)The orientation of semiconductor crystals and wafers as determined by these test methods is an important materials acceptance requirement because the orientation controls various parameters of semiconductor devices fabricated from the material. This Test Method covers techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low index atomic plane in single crystals used primarily for semiconductor