G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive This Guide describes procedures for

This Guide describes procedures for measuring filter particle retention while using UPW as the test media

SEMI PV35-1214 (technical revision)

SEMI E126-0703 (first published)

本スタンダードは，global Micropatterning Committeeで技術的に承認されている。現版はglobal Audits and Reviews Subcommitteeで2006年5月16日に発行が承認された。2006年6月にwww

This Standard was technically approved by the global Facilities Technical Committee

G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive This Guide describes procedures forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0. 330