G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials StdTpc-300 mm Carriers & Physical Interfaces The purpose of this Document

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G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials StdTpc-300 mm Carriers & Physical Interfaces The purpose of this DocumentNOTICE: This Document was reapproved with minor editorial changes. This Test Method describes a procedure to measure particles on sheet materials. The method described may be used for the measurement of particles on items such as: Leadframe Interleaves, Cleanroom Paper, and Packing Material. The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection. Referenced SEMI StandardsNone.