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• Type of PSL particles
4 — 200 mm Standard Mechanical Interface (SMIF)
SEMI E138 — Specification for XML Semiconductor Common Components
SEMI E49-0304 (designation update)
announced fab plans and ramp schedules
F09700 - SEMI F97 - Specification for Facility Package Integration, Monitoring and Control Revision:SEMI F97-0305 - Inactive • Type of PSL particlesNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide the requirements for the architecture, functionality and interfaces for facility monitoring and control systems (FMCS) and the various facility package units (FPU) to enable a
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