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originally published March 2005
diameter/thickness)
This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4
A major objective is to improve the cycle time
1 This Guide is intended in general for metrology on low stiffness substrates like wafers or other geometrical shapes such as panels
D04600 - SEMI D46 - FPD偏光板の用語 StdTpc-FPD Color Filters originally published March 2005global Flat Panel Display Materials & Components Committee20121220global Audits and Reviews Subcommittee20132www. semiviews. org www. semi. org20067 FPD FPD FPD Referenced SEMI Standards SEMI D34 Test Method for FPD Polarizing Films SEMI D50 Test Method for Surface Hardness of FPD Polarizing Film SEMI D60 Test Method of Surface Scratch Resistance for FPD Polarizing Film and Its Materials SEMI D67 Test Methods for Antifouling Property and Chemical
