D07800 - SEMI D78 - Test Method of Water Vapor Barrier Property for Plastic Films with High Gas Barrier for Electronic Devices Revision:SEMI D78-0224 - Current 1 This Guide applies to

1  This Guide applies to measurements of particles on CCCs (e

SEMI P5 — Specification for Pellicles

SEMI E4-0699 (Reapproved 0307)

本文書で説明する方法は，マスフローコントローラ（MFC： mass flow controller）にその寿命を通じてメーカーの公表した仕様を満たすだけの機能が備わっているかどうかを調べるのに役立つ。テスト結果は，複数のMFCの比較を行う上でも有益である。

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D07800 - SEMI D78 - Test Method of Water Vapor Barrier Property for Plastic Films with High Gas Barrier for Electronic Devices Revision:SEMI D78-0224 - Current 1 This Guide applies toHigh gas barrier property is required to plastic films for electronic devices such as flexible displays. The purpose of this Standard is regulation of defects test method for plastics films with high gas barrier. Determination of water vapor barrier property of plastic films with high gas barrier used for electronics devices such as flexible displays. Referenced SEMI Standards (purchase separately) None. Revision History SEMI D78 0224 (technical