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) from one processing or storage location to another
It is assumed for the purposes of this Guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef
and new requirements can be easily and consistently specified in commercial transactions
SEMI E43-1108 (complete rewrite)
SEMI C36-1121 (technical revision)
F07100 - SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System Revision:SEMI F71-1102 - Inactive ) from one processing orThis guideline was technically approved by the Global Facilities Committee and is the direct responsibility of the Japan Facilities Committee. Current edition approved by the Japan Regional Standards Committee on July 19, 2002. Initially available at www. semi. org September 2002; to be published November 2002. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive
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