G01500 - SEMI G15 - Standard Test Method for Differential Scanning Calorimetry of Molding Compounds StdPbc-0318 Revision History

Revision History

reported in square meters surface area per kilogram mass (m2/kg)

org in November 2016

3について変更がなされた。

This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment

G01500 - SEMI G15 - Standard Test Method for Differential Scanning Calorimetry of Molding Compounds StdPbc-0318 Revision HistoryNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Document describes procedures for evaluating epoxy molding compounds by differential scanning calorimetry (DSC). This test method uses SI units. Referenced SEMI Standards (purchase separately) None. Revision History