S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded • Management of recipes is

• Management of recipes is centralized to RMS (Single Point Of Recipe Management [SPORM] concept)

this Guide provides a functional structure model of an Equipment Front End Module (EFEM) that handles carriers and substrates at the interface between the factory material handling system and the process equipment

製品，またはレチクル

SEMI M12-89 (technical revision)

SEMI E133-0307 (technical revision)

S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded • Management of recipes is2010122120112www. semiviews. orgwww. semi. org199820093 : (transferor)(transferee) (ESH) Referenced SEMI Standards SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life