M00300 - SEMI M3 - Specifications for Polished Monocrystalline Sapphire Substrates StdTpc-Electronic Data Interchange Equipment Communication Standards1 Messages Transfer

Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37

通信がコンポーネントに関する事項を「検討」できるように，標準装置を定義する。

and components

1-0414 - EQUIPMENT SELF DESCRIPTION(EqSD)의 SOAP 바인딩 규격

have expanded the variety of products

M00300 - SEMI M3 - Specifications for Polished Monocrystalline Sapphire Substrates StdTpc-Electronic Data Interchange Equipment Communication Standards1 Messages TransferThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1978; previously published March 2004. NOTICE: This document was balloted and approved for withdrawal in 2007. Sapphire substrates are utilized for heteroepitaxial growth of silicon films for certain