C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components StdTpc-Gases - Specialty orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。

orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。

This Document covers a mono-dispersed GNP challenge test method for below 30 nm rated liquid filter

この文書は，幾何学的寸法に関連した計測や，

これらの寸法は，主として

and broken beads content

C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components StdTpc-Gases - Specialty orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F118. This Test Method describes the procedure for determination of the moisture dry down characteristics of components used in gas delivery systems. The results of this test can be used for the qualitative ranking of gas delivery components based on the design as it relates to moisture dry down performance of the system. This Test Method