E06300 - SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様 StdVol-Facilities 1 — Specification for XML

1 — Specification for XML Messaging for Process Control System (PCS)

SEMI E133-1110 (technical revision)

5  To comply with this Specification

This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1

It expands the GEM standard requirements and capabilities in the areas of state models (TSSC

E06300 - SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様 StdVol-Facilities 1 — Specification for XMLglobal Physical Interfaces & Carriers Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org1997200411 300 mm1SEMI E15. 1SEMI E47. 1, SEMI E62SEMI E1. 91325 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E47. 1