M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications Revision:SEMI M47-0707 (Withdrawn 1110) - Withdrawn This Standard was technically approved

This Standard was technically approved by the global Automated Test Equipment Technical Committee

SEMI M64-0915 (technical revision)

This Guide focuses on evaluating production

regulators

SEMI C14-95 (Reapproved 1102)

M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications Revision:SEMI M47-0707 (Withdrawn 1110) - Withdrawn This Standard was technically approvedThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. Initially available at www. semi. org in October 2010. Originally published November 2001; previously published July 2007. NOTICE: This document was balloted and approved for withdrawal in 2010. This specification defines thin layer silicon on insulator (SOI) wafer