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C02200 - SEMI C22 - Guide for Boron Tribromide Revision:SEMI C22-0212 - Inactive but the results are not

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Description

but the results are not intended to imply a performance rating

a device to a carrier wafer) or permanently bonded

SEMI C3 - Specifications for Gases

22 — Standard for Oxygen (O2)

SEMI M31 — Specification for Mechanical Features of Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers

C02200 - SEMI C22 - Guide for Boron Tribromide Revision:SEMI C22-0212 - Inactive but the results are notThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in February 2012; originally published in 1994; previously published March 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have

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