F06100 - SEMI F61 - Guide to Design and Operation of a Semiconductor Ultrapure Water System Revision:SEMI F61-0617 - Superseded This Specification covers reclaim wafers

This Specification covers reclaim wafers that are either customer-supplied or third party-sourced

SEMI E21-94 (Reapproved 0699)

3  This Specification defines a way for the equipment to notify users when the combination of activities on the equipment

耐薬品性

本仕様では，SEMI F20に従いステンレス鋼で製作された配管や部品の接ガス・接液面の特性評価に関する要求条件および仕上げの合格判定基準について定義し，また半導体製造で使用される気体と液体の管理や収納を目的としている。

F06100 - SEMI F61 - Guide to Design and Operation of a Semiconductor Ultrapure Water System Revision:SEMI F61-0617 - Superseded This Specification covers reclaim wafersThis Guide should be used in conjunction with SEMI F63 and SEMI F75. Together these Guides provide recommendations for facility engineers and other manufacturing professionals who are responsible for establishing programs to monitor and control the quality of their ultrapure water (UPW) systems through to point of use (POU). This Guide describes the engineering and component requirements for a UPW system used in semiconductor manufacturing. It is