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F06000 - SEMI F60 - 不動態化した316Lステンレス・スチール部品の接ガス表面の組成をESCAにより評価する試験方法 StdTpc-Documentation/Training SEMI E54-0997 (technical revision -

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4.6

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Description

SEMI E54-0997 (technical revision - replaces SEMI E65)

SEMI E6-96 (technical revision)

Advantages of the 77 K measurement are:

PVD and Plating)

which is a convenient and well accepted means of expressing optical scatter levels for many purposes

F06000 - SEMI F60 - 不動態化した316Lステンレス・スチール部品の接ガス表面の組成をESCAにより評価する試験方法 StdTpc-Documentation/Training SEMI E54-0997 (technical revision -global Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org2001320063 : 316L Referenced SEMI Standards SEMI F19 Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components

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