Pay in 4 interest-free payments of $48.25 Learn more
Ships within 48 hours · Estimated delivery Aug 18 - Aug 23
This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation
1-0701 (technical revision)
Alternative methods can be used as long as method validation as per SEMI C1 has been demonstrated
1 The control of parameters
SEMI E140-0312 (technical revision)
E02300 - SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface Revision:SEMI E23-1104 - Superseded This Specification is not intendedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Cassette transfer between process equipment and transport equipment is performed by means of a mechanical operation in the interactive area and requires quick response and reliable interlock signals. The purpose of this
