C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様 Revision:SEMI C6.2-93 (Reapproved 1111) - Replaced manufacturing

manufacturing

In particular

Due to the lack of adequate on-line particle detection metrology at the particle sizes addressed by this Guide

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use

B：形状測定を使用した段差法

C00602 - SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様 Revision:SEMI C6.2-93 (Reapproved 1111) - Replaced manufacturingNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1993200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by