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org in November 2016
The specifications provided by this Standard are intended to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits
This Document provides test methods for qualifying the mechanical integrity of gas delivery systems through vibration and shock testing
SEMI MF673¾ Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy Current Gauge
inclusion of other extrinsic materials such as gallium arsenide and indium antimonide should be feasible
S00200 - SEMI S2 - 半導体製造装置の環境，健康，安全に関するガイドライン StdPbc-0714 org in November 2016NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI environmental, health, and safetyEHS Referenced SEMI Standards (purchase separately) SEMI E6 Guide for Semiconductor Equipment Installation Documentation SEMI F5 Guide for Gaseous Effluent Handling SEMI F14 Guide for the Design of Gas
