E17700 - SEMI E177 - Specification for Transmission Electron Microscope (TEM) Lamella Carriers Used in Electron Microscopy Workflows StdPbc-0723 moisture analysis

moisture analysis

SEMI PV57-1214 (first published)

本スタンダードは，フラットパネルディスプレイ製品の再生産性およびすべてのベンダーが出荷するガラス基板の均一性を確保するために，ガラス基板に関する一定レベルの仕様を設けることを目的とする。また，本スタンダードにより，搬送装置およびカセット，製造装置内部のすべての機械的インタフェースの互換性も確保される。

Test Method B

This Standard accomplishes this by defining an operational model for Handling equipment as viewed by a factory automation controller

E17700 - SEMI E177 - Specification for Transmission Electron Microscope (TEM) Lamella Carriers Used in Electron Microscopy Workflows StdPbc-0723 moisture analysis1 Purpose 1. 1 Transmission electron microscopes (TEM) are widely used in semiconductor industry for process control, defect analysis and technology development support as the dimensions and details of the features to be investigated are well below the resolution of light microscopes and often also of scanning electron microscopes (SEM). 1. 2 To enable inspection of the interesting parts of wafers or devices with TEM, small and thin samplescalled