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SEMI MF523-1107 (Reapproved 1012)
SEMI D21-1000 (technical revision)
SF6 및 NF3이다
SEM MF523 — Practice for Unaided Visual Inspection of Polished Silicon Wafers
• Nitrogen Trifluoride (NF3)
P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Lang-English SEMI MF523-1107 (Reapproved 1012)This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1991. NOTICE: This Standard or Safety Guideline has an Inactive Status because the
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