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M03900 - SEMI M39 - 半絶縁GaAs単結晶の抵抗率及びホール係数を測定しホール移動度を決定する方法 StdPbc-0118 The SEMI Committee on Chemical

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Description

The SEMI Committee on Chemical Reagents began its efforts on etchants in 1979

エッジグリップハンドリングデバイスを使用したウェーハへのランダムアクセスは,本スタンダードの要求事項ではない。

such as thickness

This Standard only applies to components for systems

本ガイドには,以下の章が含まれる。

M03900 - SEMI M39 - 半絶縁GaAs単結晶の抵抗率及びホール係数を測定しホール移動度を決定する方法 StdPbc-0118 The SEMI Committee on ChemicalGlobal Compound Semiconductor Committee19996119998SEMI On Line19999 Van der PauwGaAsGaAs Referenced SEMI Standards None.

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