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D05100 - SEMI D51 - Specification for Handshake Method of Single Substrate for Handling Off/On Tool in FPD Production StdPbc-0998 originally published in 1983

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Description

originally published in 1983

previously published November 2002

本仕様は,

previously published September 2006

The in-line components applicable are valves (pneumatic

D05100 - SEMI D51 - Specification for Handshake Method of Single Substrate for Handling Off/On Tool in FPD Production StdPbc-0998 originally published in 1983This standard was technically approved by the global Flat Panel Display Factory Automation Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2009. It was available at www. semi. org in June 2009. Originally published March 2008. Due to the migration to large substrate sizes in FPD production, the demand for single substrate transfer, with the extensive combined use of Automated Material

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