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SEMI C23-0301 (technical revision)
6 The measurements described in this Guide are known to be applicable to BWSs with thickness in the range of 750 µm to 1550 µm
orgで入手可能となる。初版は1995年発行。前版は2005年11月発行。
SEMI C71-0421 (technical revision)
flammable colorless gas
D01700 - SEMI D17 - Mechanical Specification for Cassettes Used to Ship Flat Panel Display Glass Substrates StdPbc-1121 SEMI C23-0301 (technical revision)This specification was technically approved by the Global Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on December 15, 1999. Initially available in January 2000; to be published February 2000. Originally published September 1998. E This standard was editorially modified in January 2003 to reflect
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