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C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional) StdPbc-1123 This Specification is intended to

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Description

This Specification is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure glass as base material to be used in a 3DS-IC process or in similar applications

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

本文書の目的は,半導体産業で使用されるジメチルスルホキシドに対する要求事項を標準化し,また,要求事項に対して立証するためのテスト手順を標準化することである。このテスト方法は統計的に有効な結果を表すことが明らかとなっている。

02 grade oxygen bulk supply gas

SEMI D6 — Specification for Liquid Crystal Display (LCD) Mask Substrates

C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional) StdPbc-1123 This Specification is intended toThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1989; previously published in 1994. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen chloride is a colorless, pungent, corrosive gas having a suffocating odor. Hydrogen chloride is heavier than air and fumes strongly in moist air. It is very soluble in water and alcohol, and

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