G08500 - SEMI G85 - Specification for Map Data Format Revision:SEMI G85-0303 - Superseded The purpose of this Test

The purpose of this Test Method is to provide a standardized method for quantifying the effect of mounting attitude on a mass flow controller (MFC)

and Safety Guideline for Semiconductor Manufacturing EquipmentSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

This Document defines a test condition for mono-dispersed PSL challenge test

This Document provides an overview of these layers

This Guide includes the following:

G08500 - SEMI G85 - Specification for Map Data Format Revision:SEMI G85-0303 - Superseded The purpose of this TestNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Document describes in detail how the data items that relate to electronic mapping are to be represented in a file format. Although the examples given in this Document are for wafers, the map data format described can