T00400 - SEMI T4 - Specification for 150 mm and 200 mm Pod Identification Dimensions Revision:SEMI T4-0301 (Reapproved 0419) - Current SEMI 3D4-0915 (technical revision)

SEMI 3D4-0915 (technical revision)

and each structure is referred to by its most common name and

Location for water quality specification is defined at point-of-use (POU)

thermal load

This edition was approved for publication by the global Audits and Reviews Subcommittee on November 11

T00400 - SEMI T4 - Specification for 150 mm and 200 mm Pod Identification Dimensions Revision:SEMI T4-0301 (Reapproved 0419) - Current SEMI 3D4-0915 (technical revision)The purpose of this Specification is to ensure dimensional compatibility when mounting pod identification tags and tag identification devices. The scope of this Specification is to define: free space at a pod to allow the mounting of a pod identification tag, and free space to allow data transmission. This Specification is applicable to 150 mm and 200 mm Standard Mechanical Interfaces (SEMI E19). The space required for pod handling per SEMI E47 is