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F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0124 production and installation of equipment

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Description

production and installation of equipment

This Standard was technically approved by the Assembly & Packaging Global Technical Committee

The presence of unwanted subsurface p-n junctions may have deleterious effects on device operation

and basic services for getting object attributes and setting attribute values

identification and verification of both reticle pods and reticles

F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0124 production and installation of equipmentNOTICE: This Document was completely rewritten in 2019. The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point of use (POU) gas filters. This Test Method defines an evaluation method for POU filters of various media (e. g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are

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