F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal Revision:SEMI F111-0413 - Current — 本仕様は，多数の聴取者へのマルチキャストで配布される単体メッセージを可能にするのに必要なメッセージヘッダのデータを示す。

— 本仕様は，多数の聴取者へのマルチキャストで配布される単体メッセージを可能にするのに必要なメッセージヘッダのデータを示す。

2  Out of Scope

4-0419 (complete rewrite)

The objective of this method is to describe a general set of instrumental parameters and conditions that will achieve precise and reproducible measurements of important parameters regarding the surface condition

their specifications

F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal Revision:SEMI F111-0413 - Current — 本仕様は，多数の聴取者へのマルチキャストで配布される単体メッセージを可能にするのに必要なメッセージヘッダのデータを示す。This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment. Since EFFU is an assembly of particle filter, fan, and motor, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance. This Test Method defines an evaluation